MMR Technologies

Micro Probe Systems


MMR's Variable Temperature Micro Probe Systems, VTMP, (or Low Temperature Micro Probe Systems, LTMP) allow the user to probe devices mounted on the cold stage of a micro refrigerator. Each manipulator allows the corresponding probe to be positioned anywhere on a 10 mm x 12 mm sample to a precision of 50 microns. The chamber can be supplied with from one to seven probes, VTMP-1 to VTMP-7. The chamber in photos below is a five-probe system.

 

In addition to the refrigerator and vacuum chamber, a temperature controller is needed, either manual or programmable; a source of dry nitrogen (99.998% purity); a filter dryer; and vacuum pump capable of maintaining a vacuum <5 mTorr in the chamber. Other accessories that add to the convenience of operating the system are available from MMR.

 

 

VTMP Vacuum Chamber and Refrigerator

 

MMR's Variable Temperature Micro Probe Vacuum Chamber houses the micro miniature refrigerator and micromanipulators that enable probing of devices mounted on the cold stage of the refrigerator. Each probe can be positioned anywhere on a 10 mm x 12 mm sample to a precision of 50 microns. MMR's Micro Probe Vacuum Chamber can be supplied with from one to seven probes. The system photo shows a four-probe chamber. The drawing illustrates a seven-probe chamber.

 

Features
  • Operating Temperature: 70 K to 730 K
  • A continuous flow helium cryostat designed for the VTMP allows measurements to be extended to 10 K
  • Temperature Stability: ± 0.1 K with K-20 Programmable Controller
  • Temperature Response: 1 K/sec
  • Cooling Capacity: 250 mW at 85 K with nitrogen; 500 mW with Ar at 90 K
  • Cold Pad Size:14 mm x 10 mm
  • Standard Window Material: Fused Silica
  • Optional Window Material: Sapphire, KRS-5, Ge, etc.
  • Maxiumum Sample Size: 10 mm x 12 mm
  • Probe Travel – X/Y/Z: 25 mm x 25 mm x 6 mm
  • Positioning Accuracy: better than 50 microns
  • Electrical: SMA connectors with outer shield insulated from VTMP case. Mini-coax connects SMA to probe.
Options
  • Vibration isolation table
  • Top-down optical microscope
  • Turbo pump for higher vacuum pressure
  • Customized probes, including fiber optic, for flexibility in experiments
Download
Micro Probe System Presentation
Variable Temperature MicroProbe.pdf
Adobe Acrobat Document 1.6 MB
Download
Declaration K-20 CE
CEDeclarationK-20xx.pdf
Adobe Acrobat Document 164.7 KB