Oxford Applied Research

The Oxford Applied Research mini e-beam evaporators are employed to deposit ultra-pure films of materials. The deposition rate is highly controllable, allowing the instruments to be employed in Surface Science or thin-film applications. Full control from <0.1Å/min to >50Å/min is achieved for many materials. It is also possible to co-evaporate up to four materials with independent regulation of the deposition rate from a single power supply.

Our evaporators have no moving parts, allowing direct water-cooling of the target holder which in turn leads to extremely efficient heat transfer.