Oxford Applied Research

Piezo-Electric Gas Dosers

The piezoelectric leak valves from Oxford Applied Research are high quality allmetal (no elastomers) UHV compatible leak valves which are actuated by means of an internal piezoelectric crystal stack. Application of a voltage to the stack causes it to extend thereby lifting a ceramic plunger which, unenergised, is sealed to the valve seat by a high tension spring. The leak valves are used for gas dosing, gas pulsing, MBE gas introduction or system pressure control.



Mounting NW16CF (inlet and outlet), VCR inlet on request
Stack voltage 0-1000V
Gas leak rate 5 x 10-10 to 5 x 10-2 torr.l.s-1
Minimum pulse duration 20ms
Operation temperature Ambient
Power-off state Closed