The piezoelectric leak valves from Oxford Applied Research are high quality allmetal (no elastomers) UHV compatible leak valves which are actuated by means of an internal piezoelectric crystal stack. Application of a voltage to the stack causes it to extend thereby lifting a ceramic plunger which, unenergised, is sealed to the valve seat by a high tension spring. The leak valves are used for gas dosing, gas pulsing, MBE gas introduction or system pressure control.
|Mounting||NW16CF (inlet and outlet), VCR inlet on request|
|Gas leak rate||5 x 10-10 to 5 x 10-2 torr.l.s-1|
|Minimum pulse duration||20ms|