Oxford Applied Research

Mini Ebeam Evaporators


 

The Oxford Applied Research mini e-beam evaporators are employed to deposit ultra-pure films of materials. The deposition rate is highly controllable, allowing the instruments to be employed in Surface Science or thin-film applications. Full control from <0.1Å/min to >50Å/min is achieved for many materials. It is also possible to co-evaporate up to four materials with independent regulation of the deposition rate from a single power supply.

 

Our evaporators have no moving parts, allowing direct water-cooling of the target holder which in turn leads to extremely efficient heat transfer.

 

Specification

Model EGN1 EGN4 EGCO4
Pockets 1 4 4
Co-evaportation No No Yes
Mounting Flange

NW35CF

(70mm / 2.75")

NW35CF

(70mm / 2.75")

NW35CF

(70mm  1 / 2.75")

Ebeam Power 200W 200W 200W
Water cooling Yes Yes Yes
In-vacuum length (standard) 200mm 200mm 200mm
In-vacuum diameter 32mm 34mm 34mm
       
Download
Mini Ebeam Evaporators
EG Series.pdf
Adobe Acrobat Document 1.5 MB