The RFK30 builds on the extensive experience at Oxford Applied Research in supplying RF atom sources to the thin-film growth community. The cracker is designed to vaporise and subsequently dissociate polyatomic solids such as phosphorous, Arsenic, Selenium and Sulphur. Unlike thermal crackers, which do not fully crack the vaporised molecules, RF dissociation delivers predominantly monatomic species to the active beam, enabling excellent control over growth or incorporation of dopant species.
|In-vacuum Length||290mm (standard)|
|Max. RF Power||500W|
|Beam Diameter||Divergent. 25mm at source exit|
|Discharge Zone Materials||High-Purity Quartz/PBN liner|
|K-cell Temperature||Max. 450°C|
|Water cooling||Min. 0.5l/min|
|Discharge buffer gas||Ar, Ne, H2, N2 or mixtures|