Some organic electronic devices incorporate air-sensitive materials which must be processed in a pressurised glove-box. For small-molecule OLEDs (SMOLEDs), additional n- and p-type dopants and
metal contacts are deposited by vacuum thermal evaporation (VTE), which currently requires the cumbersome transfer of the device into a separate vacuum system.
We have now developed a vacuum evaporation unit that can be integrated into the base of a glove-box, thus facilitating in-situ deposition.
The turbo-pumped vessel has provision for several of our valved organic evaporators, thermal or e-beam metal-contact evaporators, plus a film-thickness monitor.
|Chamber design||Cylindrical stainless steel|
|Sample holder||2 inch diameter with shutter|
|Pumping||250l/s Turbo and backing pump|
|Base pressure||<10-7 mbar (O-ring sealed)|
|Sample loading||Via door inside glove box|
|ORG50V sources||2 included|
|Mini e-beam evaporator||1 included|
|Quartz crystal monitor||1 included|
|K-cell temperature||600°C (max)|
|Heater||PID autotune control|
|Valve dynamic range||>100:1|
|Beam diameter||Variable (selectable)|
|Bakeout (UHV compatible)||to 250°C|
|Valve control||Motorised, computer control|