Some organic electronic devices incorporate air-sensitive materials which must be processed in a pressurised glove-box. For small-molecule OLEDs (SMOLEDs), additional n- and p-type dopants and
metal contacts are deposited by vacuum thermal evaporation (VTE), which currently requires the cumbersome transfer of the device into a separate vacuum system.
We have now developed a vacuum evaporation unit that can be integrated into the base of a glove-box, thus facilitating in-situ deposition.
The turbo-pumped vessel has provision for several of our valved organic evaporators, thermal or e-beam metal-contact evaporators, plus a film-thickness monitor.
Chamber design | Cylindrical stainless steel |
Sample holder | 2 inch diameter with shutter |
Pumping | 250l/s Turbo and backing pump |
Base pressure | <10-7 mbar (O-ring sealed) |
Sample loading | Via door inside glove box |
ORG50V sources | 2 included |
Mini e-beam evaporator | 1 included |
Quartz crystal monitor | 1 included |
Feedstock capacity | 50cc |
K-cell temperature | 600°C (max) |
Heater | PID autotune control |
Valve dynamic range | >100:1 |
Beam diameter | Variable (selectable) |
Flange mount | NW63CF/4½” |
Bakeout (UHV compatible) | to 250°C |
Valve control | Motorised, computer control |